Compact Atmospheric Pressure Microwave Plasma Source

Compact atmospheric pressure microwave plasma source adopts a microwave hybrid mode type resonator developed by fusing the technology of three-dimensional electromagnetic field analysis considering charged particles/plasma and the design technology of high Q high power microwave resonator.
Because power can be supplied by coaxial cable, the setting of the plasma source with high flexibility is enabled, and system constitution with low cost is realized.
Plasma generated under atmospheric pressure is a non-equilibrium plasma, and the low plasma temperature enables plasma processing of the target object while suppressing thermal reactions. Therefore, it is suitable for continuous process (belt conveyor process). In addition, since it is possible to deal with organic matter including ecology, it is expected that a completely new plasma will be applied. In particular, plasma applications in the fields of nanoparticles such as carbon nanotubes, nanotechnology, biotechnology, and medicine have the potential to create new industries.